Physical available Beam aperture PSB Injection Equipment [mm]

Object Horizontal Vertical Remarks
BI.DIS 50 98   Image
         
BI.SMV1 68 30 scrapper settings Image
BI.SMV2 68 30    
BI.SMV3 68 25    
BI.SMV4 68 30    
         
DVT40        
         
BVT        
         
BI.KSW1L1 120 70    
BI.KSW1L4 132 132    
BI.KSW2L4 132 132    
BI.KSW16L4 132 132    
         
BS1 110 46 Aperture for PSB beam Image
BS2 160 46 Aperture for PSB & injected beam  
BS3 160 46 Aperture for PSB & injected beam  
BS4 180 (?) 46 Aperture for PSB beam