Physical available Beam aperture PSB Injection Equipment [mm]
Object | Horizontal | Vertical | Remarks | |
BI.DIS | 50 | 98 | Image | |
BI.SMV1 | 68 | 30 | scrapper settings | Image |
BI.SMV2 | 68 | 30 | ||
BI.SMV3 | 68 | 25 | ||
BI.SMV4 | 68 | 30 | ||
DVT40 | ||||
BVT | ||||
BI.KSW1L1 | 120 | 70 | ||
BI.KSW1L4 | 132 | 132 | ||
BI.KSW2L4 | 132 | 132 | ||
BI.KSW16L4 | 132 | 132 | ||
BS1 | 110 | 46 | Aperture for PSB beam | Image |
BS2 | 160 | 46 | Aperture for PSB & injected beam | |
BS3 | 160 | 46 | Aperture for PSB & injected beam | |
BS4 | 180 (?) | 46 | Aperture for PSB beam |